France - Supply and installation of chemical-mechanical polishing equipment with integrated cleaning and drying modules

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Details

Provided by Open Opps
Opportunity closing date
23 September 2024
Opportunity publication date
07 August 2024
Value of contract
to be confirmed
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Description

CEA-Leti is looking to acquire chemical-mechanical polishing equipment with integrated cleaning and drying modules.
The equipment is aimed at applications without metallic contamination, for use at the start of the chip manufacturing chain. The materials concerned by this type of polishing are silicon oxide, nitride and a new generation of materials.
The equipment will be installed in the CEA's clean room. It is designed to process 300mm wafers for the development of advanced 7nm FDSOI technologies and beyond.

Opportunity closing date
23 September 2024
Value of contract
to be confirmed

About the buyer

Address
Autres organismes

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